나노공정 및 소자 연구실 문서 원본 보기

Nano Process and Device Laboratory (NPDL) is a research group led by professor Jinho Ahn. NPDL was established in 1995 within the Department of Material Science and Engineering at Hanyang University. Our group actively explores nano-processes and devices. Nano-patterning technologies including EUV Lithography and thin film process are the major research fields. 3D printing technologies and the new functional materials for 3D printing are also our new concems
*소속: 서울 [[공과대학]] [[신소재공학부]]
*영문명: Nano Process and Device Laboratory
*실장: [[안진호]] [[신소재공학부]] 교수
*홈페이지: http://msenano.hanyang.ac.kr/

=연구분야=
* EUV Lithography
* Non-optical patterning
* Thin Film process

[[분류:연구실]]