나노공정 및 소자 연구실
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Nano Process and Device Laboratory (NPDL) is a research group led by professor Jinho Ahn. NPDL was established in 1995 within the Department of Material Science and Engineering at Hanyang University. Our group actively explores nano-processes and devices. Nano-patterning technologies including EUV Lithography and thin film process are the major research fields. 3D printing technologies and the new functional materials for 3D printing are also our new concems
- 소속: 서울 공과대학 신소재공학부
- 영문명: Nano Process and Device Laboratory
- 실장: 안진호 신소재공학부 교수
- 홈페이지: http://msenano.hanyang.ac.kr/
연구분야
- EUV Lithography
- Non-optical patterning
- Thin Film process
