나노공정 및 소자 연구실

Nano Process and Device Laboratory (NPDL) is a research group led by professor Jinho Ahn. NPDL was established in 1995 within the Department of Material Science and Engineering at Hanyang University. Our group actively explores nano-processes and devices. Nano-patterning technologies including EUV Lithography and thin film process are the major research fields. 3D printing technologies and the new functional materials for 3D printing are also our new concems

• 소속: 서울 공과대학 신소재공학부
• 영문명: Nano Process and Device Laboratory
• 실장: 안진호 신소재공학부 교수
• 홈페이지: http://msenano.hanyang.ac.kr/

연구분야

• EUV Lithography
• Non-optical patterning
• Thin Film process